- Title
- Ion scattering spectroscopy
- Creator
- O'Connor, D. John
- Relation
- Surface and Interface Science. Volume 1: Concepts and Methods p. 269-308
- Publisher Link
- http://dx.doi.org/10.1002/9783527680535.ch8
- Publisher
- Wiley-VCH
- Resource Type
- book chapter
- Date
- 2012
- Description
- Ion scattering spectroscopy (ISS) is a generic term that encompasses a range of techniques having in common the bombardment of a solid with energetic ion beams and measuring the energy and spatial distribution of scattered particles to ascertain the composition and stmcture of the near-surface region. At the low energy of this range, there is low-energy ion scattering (LEIS) in which 0.5- 10 keV hydrogen, inert gas, and alkali ions bombard a solid to provide information about the top one or two atomic layers. Medium-energy ion scattering (MEIS) involves the use of 50-200 keV H and He ions to probe the first two to three atomic layers, although it can probe much deeper to yield information to depths of several nanometers or more. Higher energy bombardment, 0.5- 4 MeV with H or He (and sometimes even heavier projectiles) is called Rutherford backscattering spectrometry (RBS), and it is used to probe the subsurface region with a depth resolution of (at best) 1 nm at the surface and the ability to probe depths beyond 1 μm. At energies beyond 4 MeV, the probability of nuclear excitation or reaction increases so that the process is no longer strictly ion scattering.
- Subject
- conductance; gauge; kinetic energy; mean free path; surface science; vacuum chamber
- Identifier
- http://hdl.handle.net/1959.13/1325475
- Identifier
- uon:25279
- Identifier
- ISBN:9783527411566
- Language
- eng
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